光刻用准分子激光器光谱控制中温度分布对输出光谱影响特性分析
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Published:2021
Issue:9
Volume:58
Page:0914003
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ISSN:1006-4125
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Container-title:Laser & Optoelectronics Progress
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language:en
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Short-container-title:激光与光电子学进展
Author:
Wang Qian 王倩,Zhao Jiangshan 赵江山,Guo Xin 郭馨,Fan Yuanyuan 范元媛,Zhou Yi 周翊,Jiang Rui 江锐
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics