Simulation Study on Ion Beam Polishing with Changing Aperture by Diaphragm Method
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Published:2021
Issue:8
Volume:58
Page:0810016
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ISSN:1006-4125
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Container-title:Laser & Optoelectronics Progress
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language:en
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Short-container-title:激光与光电子学进展
Author:
Kang Le 康乐,Jiang Shilei 蒋世磊,Sun Guobin 孙国斌,Zhang Yuhao 张余豪,Liu Weiguo 刘卫国
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics
Cited by
2 articles.
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