Development of Visual Size-Measurement System for Micro-Optical Components
-
Published:2021
Issue:8
Volume:58
Page:0815006
-
ISSN:1006-4125
-
Container-title:Laser & Optoelectronics Progress
-
language:en
-
Short-container-title:激光与光电子学进展
Author:
Zhao Meidan 赵美丹,Yu Guiying 余桂英,Qu Yongshun 瞿永顺,Lin Ruijie 林瑞杰,Lin Min 林敏
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics