基于微焦点X射线光栅干涉仪的波前传感与面形测量技术
-
Published:2022
Issue:23
Volume:42
Page:2334002
-
ISSN:0253-2239
-
Container-title:Acta Optica Sinica
-
language:en
-
Short-container-title:光学学报
Author:
Zhao Shuai 赵帅,Wang Qiuping 王秋平,Zhang Lei 张磊,Wang Keyi 王克逸
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials