高频非共振激励下氮化硅薄膜机械振子的频率响应
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Published:2022
Issue:13
Volume:42
Page:1327001
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ISSN:0253-2239
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Container-title:Acta Optica Sinica
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language:en
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Short-container-title:光学学报
Author:
Zhang Qiang 张强,Jiang Xinqiang 姜鑫强,Wang Doudou 王豆豆,Li Yongmin 李永民
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials