Heat accumulation effects in femtosecond laser-induced subwavelength periodic surface structures on silicon
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Published:2023
Issue:5
Volume:21
Page:051402
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ISSN:1671-7694
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Container-title:Chinese Optics Letters
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language:en
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Short-container-title:中国光学快报
Author:
Fu Qiang,Qian Jing,Wang Guande,Zhao Quanzhong
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials