Author:
Wang Chao 王超,Qu Hemeng 曲贺盟,Guan Haijun 管海军,Wang Ha 王哈,Zhang Jizhen 张继真,Xie Xiaolin 谢晓麟,Wang Ning 王宁
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference23 articles.
1. Optical design and imaging performance compensation for the lithographic lens;W C Xu,2011
2. 投影光刻物镜的光学设计与像质补偿;许伟才,2011
3. Grouping design method with real ray tracing model for extreme ultraviolet lithographic objective;Z Cao;Optical Engineering,2013
4. N.A.0.75平场复消色差显微物镜光学设计;薛金来;中国光学,2015
5. Optical design of the N.A.0.75 plan-apochromatic microscope objective;Y Gong;Chinese Optics,2015