Effect of Measured Interference Fringe Period Error on Groove Profile of Grating Masks in Scanning Beam Interference Lithography System
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Published:2014
Issue:4
Volume:34
Page:0405003
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ISSN:0253-2239
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Container-title:Acta Optica Sinica
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language:en
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Short-container-title:光学学报
Author:
Jiang Shan 姜珊,Bayanheshig 巴音贺希格,Song Ying 宋莹,Pan Mingzhong 潘明忠,Li Wenhao 李文昊
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
1 articles.
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