基于数字微镜器件的无掩模数字光刻技术研究进展
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Published:2022
Issue:11
Volume:59
Page:1100010
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ISSN:1006-4125
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Container-title:Laser & Optoelectronics Progress
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language:en
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Short-container-title:激光与光电子学进展
Author:
Xie Fanglin 谢芳琳,Wang Lei 王雷,Huang Shengzhou 黄胜洲
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics