下一代光刻机技术的探索：第六代双光束超分辨光刻机概念、技术和未来
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Published:2022
Issue:9
Volume:59
Page:0922028
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ISSN:1006-4125
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Container-title:Laser & Optoelectronics Progress
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language:en
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Short-container-title:激光与光电子学进展
Author:
Luo Zhijun 骆志军,Liu Ziyu 刘紫玉,Wang Shuhong 王舒虹,Wang Duan 王端,Gan Zongsong 甘棕松,Du Xinyao 杜炘瑶
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics