样品连续旋转的高阶导模干涉刻写多层亚波长圆光栅
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Published:2022
Issue:11
Volume:59
Page:1122001
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ISSN:1006-4125
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Container-title:Laser & Optoelectronics Progress
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language:en
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Short-container-title:激光与光电子学进展
Author:
Su Yingwen 苏盈文,Chen Zhenyu 陈振宇,Xu Yueqi 徐月奇,Wang Xiangxian 王向贤
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics