Author:
Zhu Siyu 朱思羽,Yang Baoxi 杨宝喜,Ma Xiaozhe 马晓喆,Zhang Fang 张方,Cheng Weilin 程伟林,Niu Zhiyuan 牛志元,Huang Huijie 黄惠杰
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
2 articles.
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1. 亚十纳米导向自组装与深紫外混合光刻技术;Laser & Optoelectronics Progress;2022
2. 激光光强波动无关的248 nm退偏器检测方法;Chinese Journal of Lasers;2022