Coplanarity Inspection Method for Integrated Circuit Pins Based on Single Image
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Published:2020
Issue:1
Volume:40
Page:0111023
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ISSN:0253-2239
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Container-title:Acta Optica Sinica
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language:en
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Short-container-title:光学学报
Author:
Wu Fupei 吴福培,Zhu Shukai 朱树锴,Li Shengping 李昇平
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials