Study on Stress in Si-Doped Al Thin Films Prepared by Magnetron Co-Sputtering
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Published:2020
Issue:14
Volume:40
Page:1431002
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ISSN:0253-2239
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Container-title:Acta Optica Sinica
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language:en
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Short-container-title:光学学报
Author:
Zhu Jingtao 朱京涛,Zhou Tao 周涛,Zhu Jie 朱杰,Zhao Jiaoling 赵娇玲,Zhu Hangyu 朱航宇
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
1 articles.
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