Research on Surface Roughness Related Coating Processes of Mo/Si Multilayers
-
Published:2020
Issue:10
Volume:40
Page:1031002
-
ISSN:0253-2239
-
Container-title:Acta Optica Sinica
-
language:en
-
Short-container-title:光学学报
Author:
Sun Shizhuang 孙诗壮,Jin Chunshui 金春水,Yu Bo 喻波,Guo Tao 郭涛,Yao Shun 姚舜,Li Chun 李春,Deng Wenyuan 邓文渊
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. 极紫外光刻光源的研究进展及发展趋势;Laser & Optoelectronics Progress;2022