Author:
Yuan Wei 袁伟,Zhu Yu 朱煜,Zhang Ming 张鸣,Wang Leijie 王磊杰
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference33 articles.
1. Review of monomeric large-size and high precision holographic planar grating manufacturing technology;L J Wang;Optics and Precision Engineering,2021
2. 单体大尺寸高精度全息光栅制造技术综述;王磊杰;光学 精密工程,2021
3. Beam alignment and image metrology for scanning beam interference lithography: fabricating gratings with nanometer phase accuracy;C G Chen,2003
4. Ultra-precision spatial-separated heterodyne Littrow grid encoder displacement measurement system;Z W Guo;Optics and Precision Engineering,2022
5. 超精密空间分离式外差利特罗平面光栅编码器位移测量系统;王磊杰;光学 精密工程,2022