Fabrication and characteristics of silicon-rich oxide thin films with controllable compositions
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Published:2016
Issue:5
Volume:14
Page:051603-51607
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ISSN:1671-7694
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Container-title:Chinese Optics Letters
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language:en
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Short-container-title:中国光学快报
Author:
Shiyu Zhang Shiyu Zhang,Quanjun Pan Quanjun Pan,Xu Fang Xu Fang,Kening Mao Kening Mao,and Hui Ye and Hui Ye
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials