Method of Measuring Grating Constant Based on Moiré Measurement Technology
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Published:2019
Issue:6
Volume:56
Page:062001
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ISSN:1006-4125
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Container-title:Laser & Optoelectronics Progress
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language:en
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Short-container-title:激光与光电子学进展
Author:
Cheng Weihao 程伟昊,Chen Yunyun 陈云云,Duan Chuansen 段传森,Liang Tao 梁焘,Li Yusong 李芋松
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics