Fabrication and characterization of on-chip silicon spherical-like microcavities with high Q-factors
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Published:2022
Issue:11
Volume:20
Page:111301
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ISSN:1671-7694
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Container-title:Chinese Optics Letters
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language:en
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Short-container-title:中国光学快报
Author:
Han Hailong,Li Hao,You Lixing,Liu Xiaoping
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials