Energy Control of Excimer Laser Based on Reinforcement Learning
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Published:2020
Issue:9
Volume:47
Page:0901002
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ISSN:0258-7025
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Container-title:Chinese Journal of Lasers
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language:en
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Short-container-title:中国激光
Author:
Sun Zexu 孙泽旭,Feng Zebin 冯泽斌,Zhou Yi 周翊,Liu Guangyi 刘广义,Han Xiaoquan 韩晓泉
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
1 articles.
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