Material Removal Characteristics of Polishing Pad with Small-Tool Correction
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Published:2020
Issue:4
Volume:47
Page:0403001
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ISSN:0258-7025
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Container-title:Chinese Journal of Lasers
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language:en
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Short-container-title:中国激光
Author:
Sun Rongkang 孙荣康,Wang Jindong 王金栋,Cheng Cong 成聪,Liao Defeng 廖德锋
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
1 articles.
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1. 高功率激光光学元件超精密制造技术;Acta Optica Sinica;2022