Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Space and Planetary Science,Aerospace Engineering,Atomic and Molecular Physics, and Optics
Reference25 articles.
1. Shen Runlong. Study on transmission acteristics of surface plasmons in metal insulat metal structure nano waveguides[D]. Ji''''nan: Shong University of Science Technology 2014. (in Chinese)
2. Terahertz surface plasmon polaritons and their applications;Tiejun Huang;Journal of Infrared and Millimeter Waves,2020
3. A CMOS-MEMS mirror with curled-hinge comb drives;G K Fedder;Journal of Microelectro-mechanical Systems,2003
4. Low-noise MEMS vibration sensor for geophysical applications;Journal of Microelectromechanical Systems,1999
5. MEMS vertical probe cards with ultra densely arrayed metal probes for wafer-level IC testing;R Cheng;Journal of Microelectromechanical Systems,2009