Large stroke 2-DOF nano-positioning stage with angle error correction
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Published:2013
Issue:7
Volume:21
Page:1811-1817
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ISSN:1004-924X
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Container-title:Optics and Precision Engineering
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language:en
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Short-container-title:光学 精密工程
Author:
ZHANG Xi-feng 张昔峰,HUANG Qiang-xian 黄强先,YUAN Yu 袁钰,HUANG Shuai 黄帅
Publisher
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
Subject
Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
1 articles.
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