Author:
Nie Juan 聂娟,Du Jialin 杜佳林,Li Fanxing 李凡星,Wang Simo 王思沫,Yang Fan 杨帆,Chen Qingrong 谌庆荣,Qi Bo 亓波,Yan Wei 严伟
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics
Reference41 articles.
1. Homogenization system for diode laser stack beams based on microlens array;C Q Lei;Chinese Journal of Lasers,2015
2. 基于微透镜阵列的半导体激光器堆栈匀化系统;雷呈强;中国激光,2015
3. 深紫外光刻复杂照明光学系统设计;赵阳,2010
4. Design of complex illumination optical system for deep ultraviolet lithography;Y Zhao,2010
5. 基于复眼透镜的大面积均匀照明方案研究;王沛沛;应用光学,2014
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