Measurement of the Electron Density of Capacitive-Coupled Plasma by Laser Thomson Scattering
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Published:2020
Issue:23
Volume:57
Page:231406
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ISSN:1006-4125
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Container-title:Laser & Optoelectronics Progress
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language:en
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Short-container-title:激光与光电子学进展
Author:
Zhang Zeliang 张泽亮,Song Haiying 宋海英,Liu Shibing 刘世炳
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics