FRACTURE AND WRINKLE PATTERNS IN METAL FILMS DEPOSITED ON LIQUID MENISCUSES

Abstract

Liquid meniscuses were prepared by spraying silicone oil drops with different sizes onto clean glass slides. Metal (iron) films with varied thicknesses were then deposited on the liquid meniscuses by direct current magnetron sputtering. The fracture and wrinkle behaviors of the films resulting from residual stresses are investigated in detail. It is found that cracks nucleate and propagate in the film during deposition owing to the thermal expansion of the liquid substrate. Subsequent cooling of the system creates a high compressive stress, resulting in the formation of various wrinkles in the film. The initiation and shape of the cracks are closely related to the film thickness and oil drop size. The wrinkle morphologies are dependent on the stress anisotropy induced by the liquid meniscus and crack edge.