Affiliation:
1. Electrical and Computer Engineering Division, Department of Chemical Engineering, Pohang University of Science and Technology (Postech), Pohang 790-784, Korea
Abstract
Thermal decomposition and desorption of dimethylaminoethanol [dmaeH, ( CH 3)2 NC 2 H 4 OH ] on Si(100) was studied using temperature-programmed desorption (TPD) and Auger electron spectroscopy (AES). During heating of the sample up to 1100 K, methyliminoacetaldehyde, ethylene, carbon monoxide and hydrogen molecule were desorbed as the main desorption products from dmaeH on Si(100). After TPD experiments, carbon and nitrogen were detected by AES, indicating that complete decomposition of dmaeH also proceeded on Si(100).
Publisher
World Scientific Pub Co Pte Lt
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Cited by
1 articles.
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