SYNTHESIS AND CHARACTERIZATION OF DIAMOND FILMS ADDED CO2 AND Ar UNDER CH4/H2 ATMOSPHERE

Abstract

Diamond coating was widely used in various fields because of its high performance. The study was used to describe the performance analysis of coatings prepared by CH4/H2, CH4/H2/CO2, CH4/H2/Ar, CH4/H2/CO2/Ar and analyze it by scanning electron microscopy (SEM), Raman spectrum, X-ray diffraction (XRD) and tribological experiments. The results showed that the addition of CO2 and Ar was beneficial for the preparation of coatings with smaller grain size and the friction performance was reduced, but the coating quality of nanodiamond coatings was better.