Affiliation:
1. School of Materials Science and Engineering, Shandong University, Jinan 250061, P. R. China
2. Shandong Architecture Engineering Institute, Jinan 250014, P. R. China
Abstract
Pulsed laser deposition (PLD) exhibits unique advantages for the preparation of functional thin films which are widely used in microelectronics, photoelectrons, integrate circuits, superconductors and biomedical fields. The principle of and the characteristics of PLD are introduced, its applications in ferroelectrics, high-temperature superconductors, diamond-like and superlattices. The future application trend is reviewed.
Publisher
World Scientific Pub Co Pte Lt
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Cited by
2 articles.
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