Affiliation:
1. National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210093, China
Abstract
Highly ordered crystalline and amorphous Si nanoarrays have been formed by using self-assembled monolayer of polystyrene nanospheres as a template followed by dry ion etching treatments. The template was removed by annealing at 8°C and pattern transfer process was revealed by atomic force microscopy. It was shown that the ordered Si nanotips with a height about 70–80 nm and an average lateral size around 150 nm can be obtained. Field emission with low threshold electric field (<10 V/μm) was demonstrated for both samples which can be attributed to the enhancement of local field due to the existence of surface nanostructures. Our results provide a simple and cheap way to make Si field emitters.
Publisher
World Scientific Pub Co Pte Lt
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics