SURFACE MORPHOLOGY EVOLUTION OF STRAINED InAs/GaAs(331)A FILMS

Author:

GONG ZHENG1,FANG ZHIDAN1,MIAO ZHENHUA1,NIU ZHICHUAN1

Affiliation:

1. National Laboratory for Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, P. O. Box 912, Beijing 100083, P. R. China

Abstract

Surface morphology evolution of strained InAs/GaAs (331) A films was systematically investigated in this paper. Under As -rich conditions, InAs elongated islands aligned along [Formula: see text] are formed at a substrate temperature of 510°C. We explained it as a result of the anisotropic diffusion of adatoms. Under In -rich conditions, striking change has occurred with respect to the surface morphology of the InAs layers. Instead of anisotropic InAs elongated islands, unique island-pit pairs randomly distributed on the whole surface were observed. Using cooperative nucleation mechanisms proposed by Jesson et al. [Phys. Rev. Lett.77, 1330 (1996)], we interpret the resulting surface morphology evolution.

Publisher

World Scientific Pub Co Pte Lt

Subject

Electrical and Electronic Engineering,Computer Science Applications,Condensed Matter Physics,General Materials Science,Bioengineering,Biotechnology

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