MEASUREMENT OF NANOMECHANICAL PROPERTIES OF THIN FILMS BY INTEGRATING NANOINDENTATION SYSTEM AND ATOMIC FORCE MICROSCOPE-Reference-Cited by-同舟云学术

MEASUREMENT OF NANOMECHANICAL PROPERTIES OF THIN FILMS BY INTEGRATING NANOINDENTATION SYSTEM AND ATOMIC FORCE MICROSCOPE

Published:2007-02 Issue:01 Volume:06 Page:57-64
ISSN:0219-581X
Container-title:International Journal of Nanoscience
language:en
Short-container-title:Int. J. Nanosci.

Author:

CHAO LU-PING¹,HSU JOING-SHIUN²,LAU YUNG-DONG¹

Affiliation:

1. Department of Mechanical and Computer Aided Engineering, Feng Chia University, Taichung 40724, Taiwan, ROC

2. Center for Measurement Standards, Industrial Technology Research Institute (ITRI), Hsinchu 300, Taiwan, ROC

Abstract

In this paper, the nanoindentation system and atomic force microscope (AFM) are integrated to improve the limitation of the present area function of nanoindentation test used for shallow depth. The projected areas under the shallow contact depth are modified through scanning directly the immediate vinicity of indenter tip. The results indicate that both indentation hardness and reduced modulus obtained from the proposed method are better than those of the present area function as well as the perfect geometry relation.

Publisher

World Scientific Pub Co Pte Lt

Subject

Electrical and Electronic Engineering,Computer Science Applications,Condensed Matter Physics,General Materials Science,Bioengineering,Biotechnology

Link

https://www.worldscientific.com/doi/pdf/10.1142/S0219581X07004237

Reference6 articles.

1. A critical review of microscale mechanical testing methods used in the design of microelectromechanical systems

2. J. Boussinesq, Application des Potentials à l'équi-libre et du Mouvememt des Solider élastiques 45 (Gauthier-Villars, Paris, 1885) p. 108.

3. The relation between load and penetration in the axisymmetric boussinesq problem for a punch of arbitrary profile

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