1. Advanced Technology Research Center, Mitsubishi Heavy Industries Ltd., 1-8-1 Kanazawa-ku, Yokohama 236-8515, Japan
2. Japan Synchrotron Radiation Research Institute, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148, Japan
3. Coherent X-Ray Optics Laboratory, RIKEN Harima Institute, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148, Japan