FRACTAL PULL-IN MOTION OF ELECTROSTATIC MEMS RESONATORS BY THE VARIATIONAL ITERATION METHOD

Abstract

The dynamic pull-in instability of a microstructure is a vast research field and its analysis is of great significance for ensuring the effective operation and reliability of micro-electromechanical systems (MEMS). A fractal modification for the traditional MEMS system is suggested to be closer to the real state as a practical application in the air with impurities or humidity. In this paper, we establish a fractal model for a class of electrostatically driven microstructure resonant sensors and find the phenomenon of pull-in instability caused by DC bias voltage and AC excitation voltage. The variational iteration method has been extended to obtain approximate analytical solutions and the pull-in threshold value for the fractal MEMS system. The result obtained from this method shows good agreement with the numerical solution. The simple and efficient operability is demonstrated through theoretical analysis and results comparisons.