Synthesis of TiO2 thin films by a new low-temperature solid-phase pyrolysis technique

Abstract

Thin TiO2-films were synthesized for the first time by solid-phase low-temperature pyrolysis technique onto quartz glasses or silicon substrates. The obtained films are nanoscale; crystallize in a mixed anatase-rutile modification, which was confirmed by X-ray diffraction, scanning electron and atomic force microscopy (AFM) methods. The three-layer films’ thickness was 140 nm. The TiO2-films consist of crystallites 12–27 nm, depending on the temperature treatment and phase composition. In addition, all of the obtained TiO2-films are optically transparent regardless of synthesis conditions; the calculated band gap was 3.55 eV, which makes it possible to recommend TiO2-films for use in optical filters and gas sensors.