TEM MICROSTRUCTURE ANALYSIS FOR COMPRESSIVELY STRESSED Pb(Zr,Ti)O3 THIN FILMS BY CSD-DERIVED LaNiO3 BOTTOM ELECTRODES-Reference-Cited by-同舟云学术

TEM MICROSTRUCTURE ANALYSIS FOR COMPRESSIVELY STRESSED Pb(Zr,Ti)O3 THIN FILMS BY CSD-DERIVED LaNiO3 BOTTOM ELECTRODES

Published:2012-06 Issue:02 Volume:05 Page:1260016
ISSN:1793-6047
Container-title:Functional Materials Letters
language:en
Short-container-title:Funct. Mater. Lett.

Author:

OZAWA KOTARO¹,ISHIZUKA MASAAKI¹,SAKAMOTO NAONORI¹,OHNO TOMOYA²,KIGUCHI TAKANORI³,MATSUDA TAKESHI²,KONNO TOYOHIKO³,WAKIYA NAOKI¹,SUZUKI HISAO⁴

Affiliation:

1. Department of Materials Science and Chemical Engineering, Shizuoka University, 3-5-1, Johoku, Hamamatsu 432-8561, Japan

2. Department of Materials Science, Kitami Institute of Technology, 165 Koen-cho, Kitami, Hokkaidoh, 090-8507, Japan

3. Institute for Materials Research, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan

4. Graduate School of Science and Technology, Shizuoka University, 3-5-1, Johoku, Hamamatsu 432-8561, Japan

Abstract

Pb(Zr,Ti)O3 (PZT) possesses superior ferroelectric and piezoelectric properties arisen near a morphotropic phase boundary (MPB) composition, PbZr0.53Ti0.47O3 . We have prepared a PZT (MPB composition) thin film and perovskite-type LaNiO3 (LNO) electrodes on Si substrate by chemical solution deposition (CSD) method. The CSD-derived LNO bottom electrode applied compressive stress to the PZT film and enhanced the ferroelectric properties of the PZT film. TEM and SAED revealed that stress distribution and microstructures of the PZT/LNO/ Si films effectively influenced the ferroelectric properties.

Publisher

World Scientific Pub Co Pte Lt

Subject

General Materials Science

Link

https://www.worldscientific.com/doi/pdf/10.1142/S1793604712600168

Reference20 articles.

1. Ferroelectric thin films for micro-sensors and actuators: a review

2. Piezoelectric properties of rhombohedral Pb(Zr, Ti)O3 thin films with (100), (111), and “random” crystallographic orientation

3. Crystal orientation dependence of piezoelectric properties of lead zirconate titanate near the morphotropic phase boundary

4. Analytical analysis of a circular PZT actuator for valveless micropumps

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