1. ULSI Research Department, Central Research Laboratory, Hitachi, Ltd., 1-280 Higashi-koigakubo, Kokubunji, Tokyo 185-8601, Japan
2. Musashino Office, Hitachi Device Engineering, Co. Ltd., 1-280 Higashi-koigakubo, Kokubunji, Tokyo 185-8601, Japan
3. Device Development Center, Hitachi, Ltd., 6-16-3 Shin-machi, Ome, Tokyo, 198-8512, Japan