Fabrication of Microchannels in Ceramics (Quartz) Using Electrochemical Spark Micromachining (ECSMM)

Abstract

Electrochemical Machining (ECM) and Electric Discharge Machining (EDM) processes have high potential when applied in micro regimes for good accuracy and shape reproduction. But they have a limitation that only electrically conducting materials can be machined by them. To overcome this limitation, a combination of ECM and EDM processes has been conceived, and it is known as "electrochemical spark machining" (ECSM). ECSM is slowly gaining popularity in machining of non-conductive materials. Here, an attempt is made to perform machining at micro-level on quartz. It is piezoelectric in nature, and made up of a lattice of silica ( SiO 2) tetrahedral. For micromachining of quartz, the optimal value of voltage and work piece feed are found out. The depth of microchannel is increased to increase the aspect ratio of the microchannels to make them more useful to make the component such as a micromixer. Microchannels of different shapes are also generated. Finally, the microchannels of minimum width of 144 μm are obtained.