PROGRESS ON THE FABRICATION OF ON-CHIP, INTEGRATED CHALCOGENIDE GLASS (CHG)-BASED SENSORS

Abstract

In this paper, we review ongoing progress in the development of novel on-chip, low loss planar molecular sensors that address the emerging need in the field of biochemical sensing. Chalcogenide glasses were identified as the material of choice for sensing due to their wide infrared transparency window. We report the details of manufacturing processes used to realize novel high-index-contrast, compact micro-disk resonators. Our findings demonstrate that our device can operate in dual modalities, for detection of the infrared optical absorption of a binding event using cavity enhanced spectroscopy, or sensing refractive index change due to surface molecular binding and extracting micro-structural evolution information via cavity enhanced refractometry.