LOW-Tg BISMUTH PHOSPHATE GLASSES FOR GLASS-IMPRINTING AND FABRICATION OF 2D SUB-WAVELENGTH STRUCTURE

Abstract

We have developed zinc-bismuth-phosphate glasses, which have deformation temperatures under 450°C and refractive indices higher than 1.7, in order to produce an antireflection structure on the surface by a glass-imprinting process. Two-dimensionally arrayed conical cavities of sub-wavelength size were fabricated on a SiC mold by electron lithography and dry etching techniques. The sub-wavelength periodic structure was transferred onto the glass surface by a glass-imprinting process using the mold. The sub-wavelength structure suppressed the reflectance by approximately 90%. A weak maximum was observed in the reflection spectra around 400–500 nm, which decreased in intensity and shifted toward shorter wavelengths with decreasing pitch.