Research Progress on Interface Circuit of Capacitive Micro Accelerometer

Abstract

Micro-Electro-Mechanical System (MEMS) capacitive accelerometers have received extensive attention in recent years due to their excellent performance indicators; especially in the fields of noise, power consumption, and bias instability, great development and progress have been made. In the field of noise, effective noise reduction is achieved by introducing oversampling modulation technology combined with digital noise reduction technology. In power consumption, the power consumption of the accelerometer is effectively reduced by using the successive approximation structure in the interface circuit and using the finite state machine for precise control. In bias instability, the effects of temperature offset and zero-point drift are suppressed by using a hybrid topology connection structure in the interface circuit, and an effective reduction of bias instability is achieved. In this paper, the research and progress of MEMS capacitive accelerometer in the field of noise, power consumption and bias instability are reviewed, and the articles published in recent years are listed and summarized and prospected.