1. Tianjin NO.1 Machine Tool CO., LTD, Tianjin 300385, P. R. China
2. School of Mechanical Engineering, Tianjin University, Tianjin 300354, P. R. China
3. Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361102, P. R. China