On the Flexible Abrasive Tool for Nanofinishing of Complex Surfaces

Abstract

Nanofinishing of complex surfaces is an important but costly processing step for many products for performing their functions satisfactorily. This paper deals with the development of a flexible abrasive tool for nanofinishing of complex surfaces. A flexible finishing tool similar to the ball end mill is developed by curing Polydimethylsiloxane (PDMS). A bowl-shaped copper workpiece is finished to nanometer surface roughness value. Different sizes of abrasive particles are used to reduce surface roughness value of the workpiece. A corrosion inhibitor is mixed with the abrasive slurry to protect the finished copper workpiece surface. A final surface roughness value of 50[Formula: see text]nm has been achieved with a variation up to 70[Formula: see text]nm on different locations of the bowl-shaped workpiece.