Microfabricated metal oxide array sensor based on nanosized SnO–SnO2 sensitive material

Abstract

In this work, a microfabricated metal oxide (MOX) array sensor based on nanosized SnO–SnO2 sensitive material was proposed. To maximize detection response and reduce power consumption, sensitive units supported by a multi-layer beam were suspended in center of micro reaction cell which could greatly improve thermal isolation. The sensitive units were fabricated with nanosized SnO–SnO2 sensitive material, and Au-doped sensitive material was proposed which was able to greatly increase selectivity and sensitivity of sensitive film. The results demonstrate that the sensitive unit has good specificity of benzene, and the MOX array sensor was able to detect benzene with an extremely low concentration, in which the lowest detectable concentration was less than 5 ppb.