Affiliation:
1. Department of Physics, Tsinghua University, Beijing 100084, P. R. China
Abstract
Thin films of M — C ( M = Cr , Mn , Fe ) have been deposited on silicon substrates by magnetron sputtering. It was found that interdiffusion between carbide films and silicon substrates occurred for Mn — C/Si and Fe — C/Si samples. The hardness and elastic modulus of the Cr — C films were around 16 ± 1 GPa and 210 ± 21 GPa , respectively. Mn — C and Fe — C films were not so hard as Cr — C films. The resistivity of these films at room temperature was between 0.267 and 3.40 mΩ cm. The resistivity of Cr — C and Mn — C films changed a little with time at 673 K in air.
Publisher
World Scientific Pub Co Pte Lt
Subject
Condensed Matter Physics,Statistical and Nonlinear Physics
Cited by
1 articles.
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