Fabrication and properties of the He+-implanted K9 glass waveguide

Abstract

This work reports on the fabrication and characterization of a K9 glass planar waveguide structure. The helium ion implantation was employed to form the waveguide on the K9 glass. The choices of the energy of 0.4 MeV and the dose of [Formula: see text] ions/cm2 were conducted by the SRIM 2013. The [Formula: see text]-line spectroscopy and the modal profile of the He[Formula: see text]-irradiated K9 glass waveguide were performed by the prism-coupling system and the end-face coupling technique at 0.6328 [Formula: see text]m, which suggests the capability of light propagation. The He[Formula: see text]-implanted K9 glass waveguides can serve as potential candidates for advanced integrated optoelectronic devices.