Development of a microchip based on LIGA technology for bacterial inactivation

Abstract

We designed and fabricated a new micro-needle-column discharge chip by Lithographie, Galvanoformung and Abformung technology to meet sterilization requirements. The dimensions of the chip are 11.6 mm × 11.7 mm × 3 mm. The micro-discharge structure is composed of a needle electrode and two cylinder electrodes. We employed a needle with a tip diameter of 20 [Formula: see text]m and a thickness of 20 [Formula: see text]m as the discharge cathode. We used a cylinder with a thickness of 1 mm and diameter of 0.4 mm as the anode. We carried out the gas discharge experiments in ambient air and at room temperature, without external air flow. In the experiments, a corona and glow discharge with applied voltages of −2.1 kV and −3.8 kV were realized. We carried out the sterilization experiments for six different discharge times (15, 30, 60, 90, 120 and 180 s) with an applied voltage of −3.8 kV. The inactivation efficiency of Escherichia coli and Staphylococcus aureus reached 100% for sterilization times of 120 s and 180 s. This indicates that the micro-needle-column discharge chip may be suitable as a portable sterilizer.