Ultrathin Au film on polymer surface for surface plasmon polariton waveguide application

Author:

Liu Tong12,Ji Lanting12,He Guobing12,Sun Xiaoqiang12ORCID,Wang Fei12,Zhang Daming12

Affiliation:

1. State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China

2. Jilin Provincial Engineering Laboratory on Polymer Planar Lightwave Circuit, No. 2699 Qianjin Street, Changchun 130012, China

Abstract

Formation of laterally continuous ultrathin gold films on polymer substrates is a technological challenge. In this work, the vacuum thermal evaporation method is adopted to form continuous Au films in the thickness range of 7–17 nm on polymers of Poly(methyl-methacrylate-glycidly-methacrylate) and SU-8 film surface without using the adhesion or metallic seeding layers. Absorption spectrum, scanning electron microscope and atomic force microscope images are used to characterize the Au film thickness, roughness and optical loss. The result shows that molecular-scale structure, surface energy and electronegativity have impacts on the Au film morphology on polymers. Wet chemical etching is used to fabricate 7-nm thick Au stripes embedded in polymer claddings. These long-range surface plasmon polariton waveguides demonstrate the favorable morphological configurations and cross-sectional states. Through the end-fire excitation method, propagation losses of 6-[Formula: see text] wide Au stripes are compared to theoretical values and analyzed from practical film status. The smooth, patternable gold films on polymer provide potential applications to plasmonic waveguides, biosensing, metamaterials and optical antennas.

Funder

National Natural Science Foundation of China

National Key Research and Development Plan of China

Technology Development Plan of Jilin Province

Publisher

World Scientific Pub Co Pte Lt

Subject

Condensed Matter Physics,Statistical and Nonlinear Physics

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