Movement characteristics analysis of bi-directional friction linear micro-motor driven by a set of micro-actuator

Abstract

In this paper, a bi-directional friction linear micro-motor (BFLM) driven by a set of micro-actuators was introduced and analyzed. The BFLM was fabricated using PolyMUMPs process. The impact dynamics model for the BFLM was established, and its motion equation was also derived that takes into account the friction and contact. The relative motion between the driving head and the slider, as well as forward or backward movement of the slider were analyzed in detail. The forward and backward movement displacement of the slider was measured, and the experimental results were in good agreement with theoretical predictions. The theoretical results show that the motion direction of the slider can be changed by controllable driving frequency to the BFLM. It was feasible to use a set of actuators to drive the slider in bi-directional motion.