OPTIMIZATION AND INTEGRATION OF MAGNETORESISTIVE SENSORS

Author:

FREITAS PAULO P.1,CARDOSO SUSANA1,FERREIRA RICARDO1,MARTINS VERÓNICA C.1,GUEDES ANDRÉ1,CARDOSO FILIPE A.1,LOUREIRO JOANA1,MACEDO RITA1,CHAVES RUI C.1,AMARAL JOSÉ1

Affiliation:

1. Instituto de Engenharia de Sistemas e, Computadores-Microsistemas e Nanotecnologias (INESC-MN) and Institute for Nanosciences and Nanotechnologies (IN), R. Alves Redol 9, 1000-029 Lisbon, Portugal

Abstract

This paper addresses challenging issues related to the integration of magnetoresistive (MR) sensors in applications such as magnetic field mapping, magnetic bead detection in microfluidic channels, or biochips. Although sharing the same technological principle for detection (magnetoresistance effect), each application has unique specifications in terms of noise, sensitivity, spatial resolution, electrical robustness or geometric constraints. These differences are of high impact for manufacturing, because some strategies used for sensor optimization compromise the freedom for device architecture.

Publisher

World Scientific Pub Co Pte Lt

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

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